基于微机电系统的高深宽比气相微色谱柱

doi:10.3724/SP.J.1123.2018.03037

色谱 ›› 2018, Vol. 36 ›› Issue (9): 911-916.DOI: 10.3724/SP.J.1123.2018.03037

基于微机电系统的高深宽比气相微色谱柱

罗凡^1,2, 冯飞¹, 赵斌¹, 田博文^1,2, 杨雪蕾^1,2, 周海梅¹, 李昕欣¹

1. 中国科学院上海微系统与信息技术研究所, 上海 200050;
2. 中国科学院大学, 北京 100049

收稿日期:2018-03-28 出版日期:2018-09-08 发布日期:2014-08-05
通讯作者: 冯飞,Tel:(021)62511070-5473,E-mail:fengfei507@mail.sim.ac.cn
基金资助:
国家重点研发计划（2018YFA0208504）；国家自然科学基金项目（91323304，60876081，61172151）；上海市科委项目（14DZ1105102）；国家高技术研究发展"863"计划项目（2009AA04Z317）.

High-aspect-ratio gas chromatography column based on micro-electro-mechanical system technology

LUO Fan^1,2, FENG Fei¹, ZHAO Bin¹, TIAN Bowen^1,2, YANG Xuelei^1,2, ZHOU Haimei¹, LI Xinxin¹

1. Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
2. University of Chinese Academy of Sciences, Beijing 100049, China

Received:2018-03-28 Online:2018-09-08 Published:2014-08-05
Supported by:
National Key R&D Program of China (No. 2018YFA0208504); National Natural Science Foundation of China (Nos. 91323304, 61172151, 60876081); Science and Technology Commission of Shanghai Municipality (No. 14DZ1105102), National High Technology Research and Development Program of China (863 Program) (No. 2009AA04Z317).

摘要/Abstract

摘要：

色谱柱的微型化是实现气相色谱仪微小型化必须要解决的关键问题之一。该文基于微机电系统技术设计制作了一种具有高深宽比微沟道的气相微色谱柱。通过COMSOL软件进行仿真分析，得出气相微色谱柱具有均匀的流速场分布。测试结果表明，该气相微色谱柱成功分离了烷烃类气体混合物及苯系物，其理论塔板数可达14028 plates/m，C7~C8的分离度最高，为10.82。这种气相微色谱柱由于具有体积小、能耗低、分离性能好等优点，可望在微小型气相色谱仪上获得应用。

关键词: 高深宽比微沟道, 气相微色谱柱, 微机电系统

Abstract:

Miniaturization of gas chromatography (GC) columns is one of the key problems associated with microminiaturization of a chromatograph. In this study, a GC column with high-aspect-ratio microchannel based on micro-electro-mechanical system (MEMS) technology has been designed and manufactured. Simulation and analysis by the COMSOL software revealed that the GC column has even velocity field distribution, which is crucial for improving the separation efficiency of the column. The results show that heavy hydrocarbons (C6-C10) and compounds of benzene series can be successfully separated. The number of theoretical plate is 14028 plates/m, and the resolution of C7-C8 is 10.82. Due to its advantages of smaller volume, lower energy consumption, and better separation performance, the GC column can be applied in micro gas chromatography.

Key words: gas chromatography (GC) column, high-aspect-ratio microchannel, micro-electro-mechanical systems

中图分类号:

O658

罗凡, 冯飞, 赵斌, 田博文, 杨雪蕾, 周海梅, 李昕欣. 基于微机电系统的高深宽比气相微色谱柱[J]. 色谱, 2018, 36(9): 911-916.

LUO Fan, FENG Fei, ZHAO Bin, TIAN Bowen, YANG Xuelei, ZHOU Haimei, LI Xinxin. High-aspect-ratio gas chromatography column based on micro-electro-mechanical system technology[J]. Chinese Journal of Chromatography, 2018, 36(9): 911-916.

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基于微机电系统的高深宽比气相微色谱柱

High-aspect-ratio gas chromatography column based on micro-electro-mechanical system technology

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